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  Developer TMAH
Quaternary ammonium alkali
  TMAH pentahydrate
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  Tetraethylammonium hydroxide(TEAOH)
  Tetrapropylammonium hydroxide(TPAOH)
  Tetrabutylammonium hydroxide(TBAOH)
  Benzyltrimethylammonium hydroxide
Quaternary ammonium salt
  Tetramethylammonium chloride(TMACl)
  Tetraethylammonium chloride(TEACl)
  Tetrapropylammonium chloride(TPACl)
  Tetrabutylammonium chloride(TBACl)
  Benzyltrimethylammonium Chloride
  Tetramethylammonium bromide(TMABr)
  Tetraethylammonium bromide(TEABr)
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     Current Position£ºProducts Electronic GradeTetramethylammonium Hydroxide


Electronic GradeTetramethylammonium Hydroxide

25%¡¢20%¡¢ 2.380% ( Developer TMAH )


C.A.S.NO. 75-59-2 Freezing point, ¡æ <-25.0
Formula (CH3)4NOH Viscosity 25¡æ,cst 2.8
MW 91.15 Specific [email protected] ¨H 1.022
Phase Liquid Flash point ¨H >200
Boiling point,¡æ 100.0 pH >13

Item Unit RJ-25 (MAX) RJ-20 (MAX) RJ-2.380 (MAX)
Assay % 24.90¡«25.10 19.90¡«20.10 2.377¡«2.383
Color Hazen 5 5 5
CO32-(Carbonate) ppm 100 100 10
Cl- (Chloride ) ppm 0.1 0.1 0.1
CH3OH (Methanol) ppm 40 40 10
Li (Lithium) ppb 5 5 1
Na (Sodium) ppb 10 10 1
Mg (Magnesium) ppb 5 5 1
Al (Aluminium) ppb 10 10 1
K (Potassium) ppb 10 10 1
Ca (Calcium) ppb 10 10 1
Cr (Chromium) ppb 5 5 1
Mn (Manganese) ppb 5 5 1
Fe (Iron) ppb 5 5 1
Ni (Nickel) ppb 5 5 1
Co (Cobalt) ppb 5 5 1
Cu (Copper) ppb 5 5 1
Zn (Zinc) ppb 5 5 1
Mo (Molybdenum) ppb 5 5 1
Cd (Cadmium) ppb 5 5 1
Pb (Lead) ppb 5 5 1
Ag (Silver) ppb 5 5 1
Particle ¡Ý0.5um Ea/ml 100 100 100

Usage widely used in electronic industry , especially as positive resister developer ,silicon wafer wet etchant and super clean solution for CMP process.
Storage kept in sealed container in shade
Package 1000Kg IBC drum
Shipping Information Danger class£º8       UN 1835


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